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Handbook of Thin Film Deposition: Principles, Methods, by Krishna Seshan

By Krishna Seshan

New moment version of the preferred ebook on deposition (first variation by means of Klaus Schruegraf) for engineers, technicians, and plant body of workers within the semiconductor and comparable industries. This ebook strains the expertise in the back of the outstanding progress within the silicon semiconductor and the continuing pattern in miniaturization during the last twenty years. This development has been fueled largely through more advantageous skinny movie deposition suggestions and the advance of hugely really expert apparatus to allow this deposition. The e-book contains a lot state of the art fabric. fullyyt new chapters on illness and illness regulate describe the fundamentals and the issues—as characteristic sizes curb to sub-micron dimensions, cleanliness and particle removing has to maintain speed. a brand new bankruptcy on metrology explains the expansion of subtle, automated instruments able to measuring thickness and spacing of sub-micron dimensions. The ebook additionally covers PVD, laser and e-beam assisted deposition, MBE, and ion beam the right way to assemble the entire actual vapor deposition techniques.

solely new parts obtain complete remedy: chemical mechanical sharpening which is helping reach the flatness that's required by means of glossy lithography equipment, and new fabrics used for interconnect dielectric fabrics, particularly natural polyimide materials.

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